Compact EBSD is an ultra-compact EBSD system that enables precise crystallographic orientation and crystal structure analysis in Tabletop SEM environments. By analyzing diffraction patterns, it can accurately measure microstructural information such as crystal orientation, phase, and grain structure, while also enabling integrated elemental and crystallographic analysis in combination with EDS.

With its compact design and automated analysis support functions, Compact EBSD allows advanced materials analysis to be performed easily even in space-limited environments. It is effectively used not only in research and development, but also in quality control and process analysis in industrial fields.