Products
Window to the Nano World
Ion Beam Polisher
Ion Beam Polisher
IP-10K
The IP-10K is COXEM’s upgraded Ion Beam Polisher, equipped with various options including flat-milling, cooling stage, and the air-protection module, ensuring enhanced performance and versatility for a wide range of applications. It off ers unparalleled capabilities for the precision milling of materials at the microscale levels, providing exceptional cleanliness and accuracy.
Specifications
| Ion accelerating voltage | 2 to 8kV |
|---|---|
| Milling Speed | 1,000um/h (at 8kV on Si wafer) |
| Sample stage swing angle | ±35° |
| Maximum sample size | 20(W) × 10(L) × 5.5(T)mm 16(W) × 10(D) × 9.5(H)mm |
| Specimen movement range | X axis movement : 士3.5mm Y axis movement : 士2mm |
| Flat milling stage tilt angle range | 10° to 90° |
| Sample size for flat milling | Ø32 × 18(H)mm |
| Operation | 7 inch touch panel |
| Digital microscope for sample positioning | Mag. 5x, 10x, 20x, 40x |
| Chamber camera for monitoring | Mag. 5x, 10x, 20x, 40x Brightness adjustable in 4 steps Ion beam observation mode (LED off ) |
| Gas used | Argon gas (99.999%) |
| Gas pressure | 0.03MPa ~ 0.05MPa |
| Gas flow control | Mass Flow Control unit |
| Vacuum systems | Turbo pump, Diaphragm pump |
| Dimension | 640(W) × 492(D) × 282(465)(H)mm |
| Weight | Main system 45kg / Diaphragm pump 6.5kg |
| Options | Air-protection module, Cooling module, Flat milling |
