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Ion Beam Polisher

Ion Beam PolisherIP-10K

The IP-10K is COXEM’s upgraded Ion Beam Polisher, equipped with various options including flat-milling, cooling stage, and the air-protection module, ensuring enhanced performance and versatility for a wide range of applications. It off ers unparalleled capabilities for the precision milling of materials at the microscale levels, providing exceptional cleanliness and accuracy.

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Specifications

Ion accelerating voltage	2 to 8kV
Milling Speed	1,000um/h (at 8kV on Si wafer)
Sample stage swing angle	±35°
Maximum sample size	20(W) × 10(L) × 5.5(T)mm 16(W) × 10(D) × 9.5(H)mm
Specimen movement range	X axis movement : 士3.5mm Y axis movement : 士2mm
Flat milling stage tilt angle range	10° to 90°
Sample size for flat milling	Ø32 × 18(H)mm
Operation	7 inch touch panel
Digital microscope for sample positioning	Mag. 5x, 10x, 20x, 40x
Chamber camera for monitoring	Mag. 5x, 10x, 20x, 40x Brightness adjustable in 4 steps Ion beam observation mode (LED off )
Gas used	Argon gas (99.999%)
Gas pressure	0.03MPa ~ 0.05MPa
Gas flow control	Mass Flow Control unit
Vacuum systems	Turbo pump, Diaphragm pump
Dimension	640(W) × 492(D) × 282(465)(H)mm
Weight	Main system 45kg / Diaphragm pump 6.5kg
Options	Air-protection module, Cooling module, Flat milling

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