Products
Window to the Nano World
Window to the Nano World
| EM-40 | EM-40PE | |
| Electron gun | Tungsten filament (W) | Tungsten filament (W) |
| Spatial resolution | < 5nm | < 5nm |
| Magnification | 13x to 250,000x | 13x to 250,000x |
| Accelerating voltage | 1 ~ 30kV (1kV increments) | 1 ~ 30kV (1kV increments) |
| Sample stage | X : 40mm, Y : 40mm, Z : 40mm, 3-axis motorized |
X : 50mm, Y : 50mm, Z : 40mm, 3-axis motorized |
| Detector | SE, BSE* | SE, BSE* |
| Vacuum mode | HV, LV*, VP* | HV, LV*, VP* |
| Vacuum system | Turbo pump (80L) + Rotary pump (100L) | Turbo pump (80L) + Rotary pump (100L) |
| Dimension (W × L × H) | 315(W) × 560(L) × 580(H)mm | 315(W) × 560(L) × 580(H)mm |
| Weight | 81.5 kg | 81.5 kg |
| Features | Panorama 2.0 Auto focus 1 Second auto brightness & contrast Auto start Signal mixing Triple display & Save Line profiling Image filtering Annotation tool ChamberCam |
Panorama 2.0 Auto focus 1 Second auto brightness & contrast Auto start Signal mixing Triple display & Save Line profiling Image filtering Annotation tool ChamberCam |
| Data output format | JPEG, TIFF, BMP | JPEG, TIFF, BMP |
| Options* | BSE, EDS, EBSD, STEM NaviCam, Coolstage LV (20Pa), VP (10 / 20 / 30Pa) NanofiberScanner Diaphragm pump |
BSE, EDS, EBSD, STEM NaviCam, Coolstage LV (20Pa), VP (10 / 20 / 30Pa) NanofiberScanner Diaphragm pump |