Products
Window to the Nano World
Window to the Nano World
| Electron gun | Tungsten Filament(W) |
|---|---|
| Spatial resolution | <3nm |
| Magnification | 9x to 500,000x |
| Accelerating voltage | 1 - 30kV (1kV increments) |
| Sample stage | X : 60mm, Y : 60mm, Z : 60mm, R : 360, T : -20 ~ 90º |
| Detector | SE, BSE |
| Vacuum mode | HV, LV(20Pa)*, VP(10, 20, 30Pa)* |
| Vacuum system | Turbo pump (300L) + Rotary pump (100L) |
| Dimension (W × L × H) | 640(W) × 682(L) × 1,432(H)mm, 200kg |
| Features | Panorama v2 Auto focus Auto brightness & contrast Auto start Signal mixing Triple display & Save Line profile Image filtering Annotation tool ChamberCam |
| Data output format | JPG, TIFF, BMP |
| Options* | EBSD, STEM Coolstage LV(20Pa), VP(10 / 20 / 30Pa) NanofiberScanner Scroll pump Air-protection module EDS (Oxford, Bruker) |