Products
Window to the Nano World
Window to the Nano World
| Gas Used | Ar(Argon) gas |
|---|---|
| Milling Speed | 700 μm/h (Si at 8kV) |
| Accelerating Voltage | 2~8 kV |
| Maximum Sample Size |
20(W) x 10(D) x 5.5(H)mm 16(W) x 10(D) x 9.5(H)mm |
| Rotation | ±35° |
| Sample Moving Range | (X: ±3.5mm, Y: ±2mm) |
| Display | Touch panel (1024 x 600 7 inch display) |
| Digital Camera for sample alignment | Magnification : 5x, 10x, 20x, 40x |
| Chamber Camera | Magnification : 5x, 10x, 20x, 40x 4 step brightness control Ion beam observation mode (LED off) |
| Gas Pressure | 0.03MPa ~ 0.05MPa |
| Gas flow control | Mass Flow Control unit |
| Evacuation System | Turbo-molecular pump, Diaphragm pump |
| Dimension | 640(W) x 492(D) x 282(465)(H)mm |
| Weight | Main system 45kg / Diaphragm pump 6.5kg |
| Options | X |