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S E M

CX-200Plus

CX-200Plus

Full-size SEM

Description

The CX-200PLUS product is developed for simple use by users through compact design and the upgraded software Nano-station 4.0.


ü Compact and Strong Performance

ü 3nm Resolution

ü Standard SE, BSE Detector

ü Standard Chamber Scope

ü Standard Panorama

ü Signal Mixing

ü Fully Compatible EDS

ü 10 Ports for Third party

Applications

 

By merging SE and BSE images, each properties of both images can be observed at a glance.

Specifications

Magnification15-300,000X
Spatial Resoultion<3nm
Vacuum ModeHV
Accleration Voltage1 - 30kV (adjustable in 1kV scale)
Electron SourcePre-Centered Tungsten Filament
DetectorSED(DP)
BSED(DP)
Sample Size160mm in Diameter
X,Y/ Z/ T Traverse R0-60 mm / 5-60mm/ -20 - 90º
360º
FeaturesPanorama 1.0
Auto Focus
Qick & Easy AutoB/C
Auto Filament
Auto Start
Duplex Navigation
Signal Mix
Dual Display & Save
Line Profile
Line Measure
Image Filtering
Chamber Scope
Focus, Filament, Brightness/Contrast
AutomationFocus, Filament, Brightness/Contrast
Data Output Formatjpg, tiff, BMP
Dimensions640 x 682 x 1430 mm
Weight230 kg
OPTIONSSTEM
CoolStage
Panorama 2.0
EDS (Oxford, Bruker)

Optional Products

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