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PRODUCT

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CX-200Plus

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CX-200Plus

The CX-200PLUS product is developed for simple use by users through compact design and the upgraded software Nano-station 4.0.

Key Specifications

The CX-200PLUS product is developed for simple use by users through compact design and the upgraded software Nano-station 4.0.


üCompact and Strong Performance


ü3nm Resolution


üStandard SE, BSE Detector


üStandard Chamber Scope


üStandard Panorama


üSignal Mixing


üFully Compatible EDS


ü10 Ports for Third party


Software

 Nanostation 4.0(COXEM SEM Dedicated Software)

NS 4.0 provides most intuitive and convenient UI(user interface) for operations of COXEM SEM.
NS 4.0 was designed not only for experienced SEM users but also for the first-time users.

The software Nano-station of COXEM can be used easily with a mouse and a keyboard, and it can reduce the inconvenience of users' direct operations through the Auto Function feature. Moreover, the panorama shot function, by eliminating the hassle of users to directly control the camera, move and shoot for a long time, instead allows to automatically capture dozens or hundreds of shots of the desired portion of the image. It uses the dual display mode and allows the users to see the SE, BSE modes at a glance.



 

Standard BSE Detector


Chamber Scope

 

Panorama Shot

 Panorama Shot in NanoStation 4.0 can combine hundreds or thousands of SEM images side by side into one consolidated image through stitching function.

 

This function enables the user to see large areas with high resolution image.


Signal Mixing

 By merging SE and BSE images, each properties of both images can be observed at a glance.


 

Specification

Resolution SE 3.0nm at 30kV / 8.0nm at 3kV

Resolution BSE4.0nm at 30kV
Magnificationx15 to x300,000
Digital Zoomx2, x4
Acceleration Voltages1 to 30kV
Variable Pressure Range
Maximum Specimen Size160mm in Diameter
X,Y,Z,R,TX : 0~60mm
Y : 0~60mm
Z : 5~60mm
R : 360º
T : -20~90º
DetectorSED / BSED
ControlMouse / Keyboard

Auto AlignmentAuto Beam

Observation Area130mm in Diameter
Maximum Height55mm
Stage ControlEccentric
SourceTungsten

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